An optical MEMS pressure sensor based on phase demodulation

被引：1
|
作者：
Ge, Yixian [1 ]
Wang, Ming [1 ]
Chen, Xuxing [1 ]
Yan, Haitao [1 ]
Rong, Hua [1 ]
机构：
[1] Nanjing Normal Univ, Sch Phys Sci & Technol, Jiangsu Key Lab Optoelect Technol, Nanjing 210097, Peoples R China
来源：
2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2007年
关键词：
optical fiber sensor; F-P interference; MEMS; phase demodulation;
D O I：
10.1109/OMEMS.2007.4373860
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel optical fiber pressure sensor based on Fabry-Perot (FP) interferometer and phase demodulation method is described. MEMS techniques and the common communicational components are used to fabricate the sensor. The principles of pressure measurement and sensor design have been introduced. Phase demodulation method based on Fourier transformation is explored, which can reduce errors resulting from intensity variation of light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity and a wide pressure measurement range from 0.1 MPa to 3MPa.
引用
收藏
页码：101 / 102
页数：2
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