Micro-fabrication process study for stator winding of electromagnetic micro-motor

被引：0
|
作者：
Zhao, XL [1 ]
Cai, BC [1 ]
Yang, CS [1 ]
Zhang, C [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Informat Storage Res Ctr, State Educ Minist, Thin Films & Microfabricat Key Lab, Shanghai 200030, Peoples R China
来源：
FOURTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS | 2000年 / 4086卷
关键词：
electromagnetic micro-motor; stator winding; polyimide; micro-gear; optical prism;
D O I：
10.1117/12.408401
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The micro-fabrication process for electromagnetic micro-motor stator winding, including adopting of new insulating material such as polyimide, is discussed in present study. A diameter of 2 mm electromagnetic micro-motor after adopting the new micro-fabrication process improves its performance. The motor output torque is 25% higher than before, and the operating temperature can reach 180 degreesC. Two examples of practical usage of micro-motor made by new process are given.
引用
收藏
页码：856 / 859
页数：2
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