Structural Optimization Design of Contact Probe for Three-Dimensional Thread Measuring Machine

被引：0
|
作者：
Yang, Yanling [1 ]
Lin, Ximeng [1 ]
Yu, Jing [1 ]
机构：
[1] China Jiliang Univ, Coll Metrol & Mearsurement Enginering, Hangzhou 310018, Zhejiang, Peoples R China
来源：
INTERNATIONAL CONFERENCE ON SENSORS AND INSTRUMENTS (ICSI 2021) | 2021年 / 11887卷
关键词：
Three-Dimensional Thread Measuring Machine; Structure optimization; Finite element simulation;
D O I：
10.1117/12.2602975
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
As the key measuring component of the 3D thread measuring machine, the contact probe is required to have high measurement accuracy and fast scanning speed. Therefore, a parallel reed scanning probe is proposed. The structure of the probe is determined by finite element simulation. The natural frequency simulation determines the best measuring rod length. The structure of the probe is verified by measuring the thread gauge. The experimental results show that the standard deviation of the thread gauge measurement is about 1 mu m. This structural optimization scheme provides an important theoretical basis for the design of the probe.
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页数：7
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