X-ray phase-contrast imaging with submicron resolution by using extremely asymmetric Bragg diffractions

被引：24
|
作者：
Kobayashi, K
Izumi, K
Kimura, H
Kimura, S
Ibuki, T
Yokoyama, Y
Tsusaka, Y
Kagoshima, Y
Matsui, J
机构：
[1] NEC Corp Ltd, Fundamental Res Labs, Syst Devices & Fundamental Res, Tsukuba, Ibaraki 3058501, Japan
[2] Himeji Inst Technol, Fac Sci, Ako, Hyogo 6781297, Japan
来源：
APPLIED PHYSICS LETTERS | 2001年 / 78卷 / 01期
关键词：
D O I：
10.1063/1.1337621
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have obtained x-ray phase-contrast images with high spatial resolution by using extremely asymmetric Si 111 Bragg diffractions near the critical angle of the total reflection. The x-ray image could be magnified to 294 times in both vertical and horizontal directions. By using this x-ray microscopy system, we have observed clear phase-contrast images of a 0.7-mum-wide gold-line pattern. (C) 2001 American Institute of Physics.
引用
收藏
页码：132 / 134
页数：3
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