Characteristics of low-temperature-prepared (Ba, Sr)TiO3 films post treated by novel excimer laser annealing

被引：0
|
作者：
Shye, DC [1 ]
Chiou, BS [1 ]
Hwang, CC [1 ]
Chen, JS [1 ]
Su, IW [1 ]
Chou, CC [1 ]
Cheng, HC [1 ]
机构：
[1] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 30010, Taiwan
来源：
ISAF 2002: PROCEEDINGS OF THE 13TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS | 2002年
关键词：
excimer laser annealing; low temperature; texture; residual gas analyzer (RGA);
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Thin (Ba0.5Sr0.5)TiO3 (BST) films were sputtered on Pt[FiN/Ti/Si multilayer substrates at very low temperature (150degrees C). A novel process, using wavelength 248-nm KrF excimer laser annealing (ELA), has been undertaken to implement barium strontium titanate (BST) films at a low process temperature of 300degrees C. The crystallinity and dielectric constant are greatly improved after ELA treatment. In this work, the variation of texture was investigated. Besides, the escaped oxygen atoms from BST films were detected in-situ using a residual gas analyzer (RGA) during ELA process. Thus, the degradation of upper surface is strongly influenced by the laser energy fluence for an ELA-BST film.
引用
收藏
页码：227 / 230
页数：4
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