Electrodeposition of anisotropic NiFe thin films for integrated high-frequency micro-inductor

被引：0
|
作者：
Yang, Lin-Lin [1 ,2 ]
Gao, Li-Yin [2 ]
Chen, Chunhuan [1 ]
Liu, Zhi-Quan [2 ]
机构：
[1] Dalian Jiaotong Univ, Sch Mat Sci & Engn, Dalian 116024, Peoples R China
[2] Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China
来源：
2018 19TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT) | 2018年
关键词：
micro-inductor; NiFe thin film; in-plane anisotropy; magnetic electroplating; MAGNETIC-FIELD;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
NiFe thin films were fabricated on wafer by applying 100mT external magnetic field during electroplating, and the function of in-plane parallel magnetic field in the course of the plating experiment and magnetic properties have been studied in this paper. Magnetic measurements show that in-plane anisotropy field can be abtained by magnet-electroplating, and the magnetic properties are very sensitive to the thickness of film. The Ni70Fe30 film with thickness of both 0.6 mu m and 1.2 mu m exhibit significantly uniaxial surface anisotropy and the complex permeability of the direction of parallel magnetic field can reach about 220 while 2 mu m NiFe thin film does not have a uniaxial magnetic anisotropy. The results also show that the ferromagnetic-resonance frequency(FMR) can run up to 500Mz when the thickness is suitable, which is an essential performance in the design of micro-inductor devices.
引用
收藏
页码：1241 / 1245
页数：5
相关论文
共 50 条
  • [31] High-frequency ferromagnetic properties of FeNdBO thin films
    Liu, Meimei
    Li, Shandong
    Duh, Jenq-Gong
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2008, 455 (1-2) : 516 - 518
  • [32] Perovskite thin films for high-frequency capacitor applications
    Dimos, D
    Mueller, CH
    [J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1998, 28 : 397 - 419
  • [33] High-frequency permeability of thin amorphous wires with various anisotropic fields
    Malliavin, MJ
    Acher, O
    Boscher, C
    Bertin, F
    Larin, VS
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1999, 196 : 420 - 422
  • [34] High-frequency permeability of thin amorphous wires with various anisotropic fields
    Malliavin, M.-J.
    Acher, O.
    Boscher, C.
    Bertin, F.
    Larin, V.S.
    [J]. Journal of Magnetism and Magnetic Materials, 1999, 196 : 420 - 422
  • [35] High-frequency applications of high-temperature superconductor thin films
    Klein, N
    [J]. REPORTS ON PROGRESS IN PHYSICS, 2002, 65 (10) : 1387 - 1425
  • [36] Multilayered Cu/NiFe thin films for electromagnetic interference shielding at high frequency
    Kwon, Hyun Jun
    Park, Jong-Hwan
    Suh, Su Jeong
    [J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2022, 914
  • [37] Complex high-frequency magnetization dynamics and magnetoimpedance in thin films
    da Silva, R. B.
    Viegas, A. D. C.
    Correa, M. A.
    de Andrade, A. M. H.
    Sommer, R. L.
    [J]. PHYSICA B-CONDENSED MATTER, 2006, 384 (1-2) : 172 - 174
  • [38] Influence of substrate on the high-frequency permeability of thin iron films
    S. N. Starostenko
    K. N. Rosanov
    S. A. Maklakov
    I. A. Ryzhikov
    [J]. Journal of Communications Technology and Electronics, 2013, 58 : 821 - 827
  • [39] Influence of substrate on the high-frequency permeability of thin iron films
    Starostenko, S. N.
    Rosanov, K. N.
    Maklakov, S. A.
    Ryzhikov, I. A.
    [J]. JOURNAL OF COMMUNICATIONS TECHNOLOGY AND ELECTRONICS, 2013, 58 (08) : 821 - 827
  • [40] The heating of thin molybdenum films in a high-frequency electric field
    Wright, DA
    [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY, 1940, 52 : 253 - 265
12345