Study of ZrO2/Al2O3/ZrO2 and Al2O3/ZrO2/Al2O3 Stack Structures Deposited by Sol-Gel Method on Si

被引：3

作者：

Vitanov, P. ^{[1
]}

Harizanova, A. ^{[1
]}

Ivanova, T. ^{[1
]}

Dimitrova, T. ^{[2
]}

机构：

[1] Bulgarian Acad Sci, Cent Lab Solar Energy & New Energy Sources, Blvd Tzarigradsko Chaussee 72, Sofia, Bulgaria

[2] Four Dimens Inc, Hayward, CA USA

来源：

FUNDAMENTALS AND TECHNOLOGY OF MULTIFUNCTIONAL OXIDE THIN FILMS (SYMPOSIUM G, EMRS 2009 SPRING MEETING) | 2010年 / 8卷

关键词：

FILMS; LAYER;

D O I：

10.1088/1757-899X/8/1/012027

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Based on our previous experience with pseudobinary alloys of (Al2O3)(x)(ZrO2)(1-x) as high-k materials and passivating coatings for solar cells, stack systems of ZrO2/Al2O3/ZrO2 and Al2O3/ZrO2/Al2O3, deposited by simple and low cost sol-gel technology have been studied. The thin films of ZrO2 and Al2O3 were sequentially obtained on Si substrates including spin coating deposition from stable solutions. High resolution scanning electron microscopy (HRSEM) was used to compare the morphology of the nanolaminates. The layers were optically characterized by UV-VIS spectrophotometry. The electrical measurements were carried out on metal-insulator-semiconductor (MIS) structures. Their leakage current and relative permittivity were determined.

引用

页数：4

共 50 条

[1] Comparative study on corrosion behavior of plasma sprayed Al2O3, ZrO2, Al2O3/ZrO2 and ZrO2/Al2O3 coatings
Sathish, S.
Geetha, M.
[J]. TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA, 2016, 26 (05) : 1336 - 1344
[2] SOLUBILITY OF AL2O3 IN ZRO2
TANANAEV, IV
KHODZHAMBERDIEV, MS
SALYN, AL
BERESNEV, EN
PAKHOMOV, VI
ORLOVSKII, VP
[J]. INORGANIC MATERIALS, 1988, 24 (11) : 1651 - 1653
[3] PHOTOLUMINESCENCE OF ZRO2/AL2O3
LLOPIS, J
VILA, R
IBARRA, A
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1991, 119 : 719 - 724
[4] 等离子喷涂制备Al2O3,ZrO2,Al2O3/ZrO2和ZrO2/Al2O3涂层的腐蚀性能(英文)
S.SATHISH
M.GEETHA
[J]. Transactions of Nonferrous Metals Society of China, 2016, 26 (05) : 1336 - 1344
[5] Study of ZrO2/Al2O3 multilayers
Gao, PT
Meng, LJ
dos Santos, MP
Teixeira, V
Andritschky, M
[J]. VACUUM, 2002, 64 (3-4) : 267 - 273
[6] SLIP CASTING OF AL2O3 AND AL2O3/ZRO2 COMPOSITES
BELLOSI, A
GALASSI, C
GUICCIARDI, S
[J]. JOURNAL OF MATERIALS SCIENCE, 1990, 25 (10) : 4331 - 4340
[7] ZrO2／γ－Al2O3复合载体的制备及ZrO2在γ－Al2O3表面
韦薇，段连运，汪传宝，谢有畅
[J]. 天然气化工, 1994, (01)
[8] Studies on properties of nanosized ZrO2/Al2O3 composite support and Ni/ZrO2/Al2O3 catalyst
Li, N
Luo, LT
Ouyang, Y
[J]. CHINESE JOURNAL OF CATALYSIS, 2005, 26 (09) : 775 - 779
[9] Porous nanocomposites 2:: Pore-structure stability of pure ZrO2, ZrO2(matrix)-Al2O3 and Al2O3(matrix)-ZrO2 nanocomposites
Nair, P
Nair, J
Doesburg, EBM
Van Ommen, JG
Ross, JRH
Burggraaf, AJ
Oosawa, Y
Mizukami, F
[J]. JOURNAL OF POROUS MATERIALS, 1999, 6 (01) : 69 - 76
[10] Porous Nanocomposites 2: Pore-Structure Stability of Pure ZrO2, ZrO2(matrix)-Al2O3 and Al2O3(matrix)-ZrO2 Nanocomposites
Padmakumar Nair
Jalajakumari Nair
E.B.M. Doesburg
J.G. van Ommen
J.R.H. Ross
A.J. Burggraaf
Y. Oosawa
F. Mizukami
[J]. Journal of Porous Materials, 1999, 6 : 69 - 76

← 1 2 3 4 5 →