Design and Fabrication of Fresnel Lenses Array

被引：0

作者：

Kusko, Mihai ^{[1
]}

Avram, Andrei ^{[1
]}

机构：

[1] Natl Inst Res & Dev Microtechnol IMT Bucharest, Erou Iancu Nicolae 126A, Bucharest 077190, Romania

来源：

2021 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS) | 2021年

关键词：

Fresnel lenses; Beam propagation method; infrared filters;

D O I：

10.1109/CAS52836.2021.9604163

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work is studied the possibility to integrate a Fresnel lens array in a compact infrared spectrometer with the scope of focusing and also spectral filtering the incoming radiation, by using their inherent wavelength dependence. From the simulations results obtained with Beam propagation Method one can obtain a 3X3 array formed of two-level Fresnel lenses presenting good results regarding the focusing efficiency and the spectral response. The lens array have been fabricated by DRIE with good results regarding the etch depth control and the snoothness of the etched surfaces.

引用

页码：75 / 78

页数：4

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