Off-axis low coherence interferometry for surface topology measurement

被引：0

作者：

Delacretaz, Yves ^{[1
]}

Boss, Daniel ^{[1
]}

Lang, Florian ^{[2
]}

Depeursinge, Christian ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Adv Photon Lab MVD, Stn 17, CH-1015 Lausanne, Switzerland

[2] CHU Vaudois, Serv ORL, CH-1011 Lausanne, Switzerland

来源：

SPECKLE 2010: OPTICAL METROLOGY | 2010年 / 7387卷

基金：

瑞士国家科学基金会;

关键词：

Low coherence; interferometry; topology measurement; INTERPOLATION;

D O I：

10.1117/12.870742

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.

引用

页数：9

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