Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared

被引:12
|
作者
Qiao, Qifeng [1 ]
Sun, Haoyang [1 ]
Liu, Xinmiao [1 ,2 ,3 ]
Dong, Bowei [2 ,3 ]
Xia, Ji [1 ]
Lee, Chengkuo [2 ,3 ]
Zhou, Guangya [1 ,3 ]
机构
[1] Natl Univ Singapore, Dept Mech Engn, Singapore 117579, Singapore
[2] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117583, Singapore
[3] Natl Univ Singapore, Ctr Intelligent Sensors & MEMS CISM, Singapore 117608, Singapore
关键词
silicon photonics; MIR photonics; optical MEMS; photonic integrated circuit; reconfigurable photonics; METAMATERIAL; MODULATORS; PLATFORM; PHOTONICS; DEVICES; FILTER;
D O I
10.3390/mi12111311
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks. However, there is still a need for the development of MIR reconfigurable photonics to enable powerful on-chip optical systems and new functionalities. In this paper, we present an MIR (3.7~4.1 mu m wavelength range) MEMS reconfiguration approach using the suspended silicon waveguide platform on the silicon-on-insulator. With the sub-wavelength grating claddings, the photonic waveguide can be well integrated with the MEMS actuator, thus offering low-loss, energy-efficient, and effective reconfiguration. We present a simulation study on the waveguide design and depict the MEMS-integration approach. Moreover, we experimentally report the suspended waveguide with propagation loss (-2.9 dB/cm) and bending loss (-0.076 dB each). The suspended waveguide coupler is experimentally investigated. In addition, we validate the proposed optical MEMS approach using a reconfigurable ring resonator design. In conclusion, we experimentally demonstrate the proposed waveguide platform's capability for MIR MEMS-reconfigurable photonics, which empowers the MIR on-chip optical systems for various applications.
引用
收藏
页数:13
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