Solid-State Nanopore

被引：42

作者：

Yuan, Zhishan ^{[1
]}

Wang, Chengyong ^{[1
]}

Yi, Xin ^{[2
]}

Ni, Zhonghua ^{[3
]}

Chen, Yunfei ^{[3
]}

Li, Tie ^{[4
]}

机构：

[1] Guangdong Univ Technol, Sch Electromech Engn, Guangzhou 510006, Guangdong, Peoples R China

[2] South China Univ Technol, Sch Med, Guangzhou 510006, Guangdong, Peoples R China

[3] Southeast Univ, Jiangsu Key Lab Design & Manufacture Micronano Bi, Nanjing 211189, Jiangsu, Peoples R China

[4] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai 200050, Peoples R China

来源：

NANOSCALE RESEARCH LETTERS | 2018年 / 13卷

关键词：

Solid-state nanopore; Fabrication; Applications; ENERGY-CONVERSION; FOCUSED ION; DNA; FABRICATION; LITHOGRAPHY; TRANSLOCATION; PERFORMANCE; TRANSPORT; MEMBRANES; DEVICES;

D O I：

10.1186/s11671-018-2463-z

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Solid-state nanopore has captured the attention of many researchers due to its characteristic of nanoscale. Now, different fabrication methods have been reported, which can be summarized into two broad categories: "top-down" etching technology and "bottom-up" shrinkage technology. Ion track etching method, mask etching method chemical solution etching method, and high-energy particle etching and shrinkage method are exhibited in this report. Besides, we also discussed applications of solid-state nanopore fabrication technology in DNA sequencing, protein detection, and energy conversion.

引用

页数：10

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