Modulated free-carrier absorption in silicon - a spectroscopy approach

被引：2

作者：

Bychto, Leszek ^{[1
]}

Patryn, Aleksy ^{[1
]}

机构：

[1] Koszalin Univ Technol, Elect & Comp Sci, PL-75453 Koszalin, Poland

来源：

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 2015年 / 252卷 / 06期

关键词：

modulated free-carrier absorption (MFCA); photocarrier radiometry (PCR); silicon; spectroscopy; RADIOMETRY; WAFERS;

D O I：

10.1002/pssb.201451416

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

In the paper, an analysis of the spectral characteristics of the MFCA (modulated free-carrier absorption) signal for silicon 3-5 cm, n-type is presented. During the change of the wavelength of a probe light, three distinctive regions are observed in the amplitude and the phase characteristics. In the first region ((probe)<<hc/E-g), only the PCR (photocarrier radiometry) signal exists. The second region ((probe)>hc/E-g) is typical for the MFCA signal. The nature of the third region ((probe) near hc/E-g), characterized by a long relaxation time is being studied here. The spectroscopy approach to the MFCA technique provided an opportunity to explain the type of free-carrier scattering mechanism that dominates in the NIR region. In the paper, an attempt was also undertaken to estimate the recombination parameters of the sample. (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：1311 / 1318

页数：8

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