Surface micromachining: A brief introduction

被引：9
|
作者：
Mehregany, M [1 ]
Zorman, CA
机构：
[1] Case Western Reserve Univ, Dept Elect Engn & Appl Phys, Cleveland, OH 44106 USA
[2] Case Western Reserve Univ, Microfabricat Lab, Cleveland, OH 44106 USA
来源：
MRS BULLETIN | 2001年 / 26卷 / 04期
关键词：
D O I：
10.1557/mrs2001.61
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：289 / 290
页数：2
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