Micromachined shear stress sensors for flow control applications

被引：2
|
作者：
Sheplak, Mark [1 ]
Cattafesta, Louis [1 ]
Tian, Ye [1 ]
机构：
[1] Univ Florida, Interdisciplinary Microsyst Grp, Gainesville, FL 32611 USA
来源：
IUTAM SYMPOSIUM ON FLOW CONTROL AND MEMS | 2008年 / 7卷
关键词：
shear stress sensors; MEMS; flow control;
D O I：
10.1007/978-1-4020-6858-4_8
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
This paper reviews existing microelectromechanical systems-based shear stress sensors in the context of their suitability for various flow control situations. The advantages and limitations of existing devices for use in flow control systems are discussed. Unresolved technical issues are summarized and recommendations provided for future sensor development.
引用
收藏
页码：67 / 73
页数：7
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