共 50 条
- [2] Optical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane [J]. 2019 20TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2019,
- [3] A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane [J]. SCIENTIFIC REPORTS, 2015, 5
- [5] Micro-machined micro ion source for flexible and concurrent process [J]. MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, : 371 - 374
- [6] Micro-machined Pendulum and Non-driven Micro-machined Gyroscope [J]. 2011 INTERNATIONAL CONFERENCE ON PHYSICS SCIENCE AND TECHNOLOGY (ICPST), 2011, 22 : 517 - 523
- [7] A micro-machined source transducer for a parametric array in air [J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2009, 125 (04): : 1879 - 1893
- [8] Effect of Shared Cavity on Electromechanical Performance of Piezoelectric Based Micro-machined Ultrasonic Transducer Array [J]. 2019 14TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE-NEMS 2019), 2019, : 482 - 487
- [9] A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT [J]. SENSORS, 2015, 15 (02): : 2538 - 2547
- [10] Evaluation of Static Characteristics of Capacitive Micro-machined Ultrasound Transducer [J]. 2017 14TH INTERNATIONAL CONFERENCE: THE EXPERIENCE OF DESIGNING AND APPLICATION OF CAD SYSTEMS IN MICROELECTRONICS (CADSM), 2017, : 408 - 411