Thermoelastic coupling effect on a micro-machined beam resonator

被引：77
|
作者：
Guo, FL [1 ]
Rogerson, GA [1 ]
机构：
[1] Univ Salford, Dept Math & Comp Sci, Salford M5 4WT, Lancs, England
来源：
MECHANICS RESEARCH COMMUNICATIONS | 2003年 / 30卷 / 06期
关键词：
micro-machined resonator; thermo-elasticity; frequency shift;
D O I：
10.1016/S0093-6413(03)00061-2
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
In this paper, the effect of thermoelastic coupling on a micro-machined resonator is studied. The calculated results show that the frequency shift ratio caused by thermoelastic coupling is of the order of 10(-3), which is much larger than that of air-damping. Furthermore, the non-dimensional frequency is scale-dependent with thermoelastic coupling being considered. In contrast, the non-dimensional frequency only depends upon the ratio of thickness to length when the themoelastic coupling effect is disregarded. (C) 2003 Elsevier Ltd. All rights reserved.
引用
收藏
页码：513 / 518
页数：6
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