Efficient broadband silicon-on-insulator grating coupler with low backreflection

被引:57
|
作者
Na, Neil [1 ]
Frish, Harel [2 ]
Hsieh, I-Wei [1 ]
Harel, Oshrit [2 ]
George, Roshan [1 ]
Barkai, Assia [2 ]
Rong, Haisheng [1 ]
机构
[1] Intel Corp, Santa Clara, CA 95054 USA
[2] Micron, IL-82109 Qiryat Gat, Israel
关键词
WAVE-GUIDES; OPTICAL-FIBERS;
D O I
10.1364/OL.36.002101
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We design and fabricate an efficient broadband grating coupler on a 400nm thick silicon-on-insulator wafer. The measured coupling loss is 3 dB when coupling to a single-mode fiber at 1310nm wavelength with TE polarization. The spectral FWHM and backreflection are determined to be 58nm and -27 dB, respectively. (C) 2011 Optical Society of America
引用
收藏
页码:2101 / 2103
页数:3
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