Efficient, Broadband and Compact Metal Grating Couplers for Silicon-on-Insulator Waveguides

被引：0
|
作者：
Scheerlinck, Stijn [1 ]
Schrauwen, Jonathan [1 ]
Taillaert, Dirk [1 ]
Van Thourhout, Dries [1 ]
Baets, Roel [1 ]
机构：
[1] IMEC Ghent Univ, Photon Res Grp, B-9000 Ghent, Belgium
来源：
2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5 | 2007年
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暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Metal grating couplers for Silicon-on-Insulator waveguides are proposed. A silver grating coupler with 33% coupling efficiency is designed. A gold gating coupler prototype is fabricated using Focused Ion Beams demonstrating over 10% coupling efficiency. (C) 2007 Optical Society of America
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页码：514 / 515
页数：2
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