Design and Analysis of a Piezoelectric-Actuated Biaxial Asymmetrical Compliant Micromanipulator

High-performance and multi-function micromanipulator is favored by micromanipulation and microassembly systems. In this paper, a piezoelectric-actuated biaxial asymmetrical compliant micromanipulator is designed for gripping and rolling small targets. Parallel operation with large stroke is realized by the left and right sides of the micromanipulator with a well-designed multi-stage flexible amplifying mechanism. The pseudo-rigid-body model and the instantaneous center method are adopted to determine the displacement amplification ratio of the micromanipulator. The accuracy and applicability of the displacement amplification model are verified by conducting simulation studies with finite element analysis (FEA). It is shown that the clamping stroke and rubbing stroke of the micromanipulator are 357.94 mu m and 245.48 mu m, respectively. Furthermore, the stiffness, gripping force, and natural frequency of the micromanipulator are also evaluated by FEA simulations. The results demonstrate that the designed biaxial compliant micromanipulator has the ability of performing delicate and dexterous operations on small targets such as optical fiber.