Visualizing acoustic displacements of capacitive micromachined transducers using an interferometric microscope

被引：12
|
作者：
Davis, LAJ [1 ]
Billson, DR
Hutchins, DA
Noble, RA
机构：
[1] Univ Warwick, Sch Engn, Coventry CV4 7AL, W Midlands, England
[2] QinetiQ, Great Malvern WR14 3PS, Worcs, England
来源：
ACOUSTICS RESEARCH LETTERS ONLINE-ARLO | 2005年 / 6卷 / 02期
关键词：
D O I：
10.1121/1.1851391
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
The modification of a commercial Wyko optical profilometer to operate stroboscopically has been demonstrated. This has then been applied to the characterization of a micro-mechanical device subjected to high frequency periodic excitation. It is demonstrated that displacement amplitudes can be mapped across the surface of a micromachined transducer at ultrasonic frequencies. (C) 2005 Acoustical Society of America.
引用
收藏
页码：75 / 79
页数：5
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