A self-consistent modeling and simulation of transformer coupled plasma discharge

被引：6
|
作者：
Yoon, NS [1 ]
You, KI [1 ]
Hwang, SM [1 ]
机构：
[1] Korea Basic Sci Inst, Taejon 305333, South Korea
来源：
SURFACE & COATINGS TECHNOLOGY | 1999年 / 112卷 / 1-3期
关键词：
modeling and simulation; TCP;
D O I：
10.1016/S0257-8972(98)00746-4
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A self-consistent model of transformer coupled plasma (TCP) discharge is developed, combining transport and heating models. The transport model is composed of electron and ion continuity and temperature equations. The heating model covers arbitrary values of the collision frequency, including collisionless heating mechanisms and modulation effects by walls. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：34 / 37
页数：4
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