Microwave integrated circuits using thin-film BST

被引：0

作者：

York, R ^{[1
]}

Nagra, A ^{[1
]}

Erker, E ^{[1
]}

Taylor, T ^{[1
]}

Periaswamy, P ^{[1
]}

Speck, J ^{[1
]}

Streiffer, S ^{[1
]}

Auciello, O ^{[1
]}

机构：

[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA

来源：

PROCEEDINGS OF THE 2001 12TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS I AND II | 2001年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We discuss the development and potential applications of a microwave varactor technology using thin-film BST on inexpensive substrates. BST thin-films have been developed and optimized specifically for microwave integrated circuits, using both MOCVD-grown and RF magnetron-sputtered films. The material optimization efforts have concentrated on achieving high tunability and simultaneous low loss, and also developing robust electrode systems for circuit fabrication on silicon substrates. We present advances in monolithic microwave integrated capacitors and application to high performance and low-cost phase-shifters circuits. Efforts in frequency multiplication devices,will also be presented.

引用

页码：195 / 200

页数：6

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