A New Method for Circular Grating's Eccentricity Identification and Error Compensation

被引：8
|
作者：
Su Zhikun [1 ]
Qiu Zurong [1 ]
Wang Chenglin [1 ]
Li Xinghua [1 ]
机构：
[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin, Peoples R China
来源：
2015 FIFTH INTERNATIONAL CONFERENCE ON INSTRUMENTATION AND MEASUREMENT, COMPUTER, COMMUNICATION AND CONTROL (IMCCC) | 2015年
关键词：
circular grating; eccentric parameters identification; calibration; error compensation; uncertainty analysis;
D O I：
10.1109/IMCCC.2015.83
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The eccentricity is the main concern when installing a benchmark circular grating, because it accounts for the majority of the angular measurement error. A new method to identify the magnitude and direction of the eccentricity after the installation was proposed. Compared with models in the form of Fourier series, the model of the new method has fewer coefficients and a better error compensation effect. According to the calibration experiment, putting the new model into practical error compensation, the uncertainty of the angular measurement was reduced by 79.4%.
引用
收藏
页码：360 / 363
页数：4
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