Measuring angle's error analysis and compensation of circular grating sensor based on Monte Carlo method

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作者：
School of Electrical Engineering and Automation, Harbin University of Technology, Harbin 150001, China [1 ]
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来源：
Guangdianzi Jiguang | / 7卷 / 1381-1388期
关键词：
Angle errors - Circular gratings - Combined effect - Distribution characteristics - Measurement precision - Numerical calculation - Physical analysis - Processing capability;
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