Magnetic field effects in RF magnetron sputtering of CdS/CdTe solar cells

被引：0
|
作者：
Compaan, AD [1 ]
Shao, M [1 ]
Tabory, CN [1 ]
Feng, Z [1 ]
Fischer, A [1 ]
Shen, F [1 ]
Narayanswami, C [1 ]
Bohn, RG [1 ]
机构：
[1] UNIV TOLEDO,DEPT PHYS & ASTRON,TOLEDO,OH 43606
来源：
13TH NREL PHOTOVOLTAICS PROGRAM REVIEW | 1996年 / 353期
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D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：360 / 367
页数：8
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