Growth mechanism of electron density in radio frequency afterglow plasmas

被引：1
|
作者：
Ohtsu, Y [1 ]
Shimizu, K [1 ]
Fujita, H [1 ]
机构：
[1] Saga Univ, Saga, Japan
来源：
ELECTRICAL ENGINEERING IN JAPAN | 2001年 / 135卷 / 02期
关键词：
RF afterglow plasma; time-resolved probe measurement; metastable excited atoms; Penning effect; temporal evolution of electron density;
D O I：
10.1002/eej.4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Temporal evolutions of electrons have been investigated on extinction process in radio frequency (RF) afterglow plasmas using various gases. The electron density was found to increase just after the RF power was switched off, and then decayed. This density growth depended on the gas pressure and gas mixture ratio, especially the amount of Ar gas. The growth mechanism has been studied by considering collisions between the metastable atoms to account fully for the results. (C) 2001 Scripta Technica.
引用
收藏
页码：26 / 32
页数：7
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