Metalorganic vapor phase epitaxy growth of high quality cubic GaN on GaAs (100) substrates

被引:36
|
作者
Wu, J
Yaguchi, H
Onabe, K
Shiraki, Y
Ito, R
机构
[1] Univ Tokyo, Dept Appl Phys, Bunkyo Ku, Tokyo 113, Japan
[2] Univ Tokyo, Adv Sci & Technol Res Ctr, Meguro Ku, Tokyo 153, Japan
关键词
MOVPE; cubic GaN; high quality; 1,1-dimethylhydrazine (DMHy); X-ray diffraction; photoluminescence;
D O I
10.1143/JJAP.37.1440
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the growth of high quality cubic GaN films on GaAs (100) substrates by low pressure metalorganic vapor phase epitaxy. The GaN films exhibit a smooth surface which is free from cracks. X-ray diffraction shows the cubic nature of the GaN films. X-ray rocking curve with omega scan shows that the crystal quality of GaN films improves markedly with increasing growth temperatures. Photoluminescence measurements confirm the high quality of the cubic GaN films. The full width at half maximum of excitonic emission from the cubic GaN films is as narrow as 70 meV at 300 K.
引用
收藏
页码:1440 / 1442
页数:3
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