Self-excited coupled-microcantilevers for mass sensing

被引：22

作者：

Endo, Daichi ^{[1
]}

Yabuno, Hiroshi ^{[1
]}

Higashino, Keiichi ^{[2
]}

Yamamoto, Yasuyuki ^{[3
]}

Matsumoto, Sohei ^{[4
]}

机构：

[1] Univ Tsukuba, Grad Sch Syst & Informat Engn, Tsukuba 3058573, Japan

[2] Keio Univ, Grad Sch Sci & Technol, Yokohama, Kanagawa 2238522, Japan

[3] Natl Inst Adv Ind Sci & Technol, Mat Properties Div, Tsukuba 3058564, Japan

[4] Natl Inst Adv Ind Sci & Technol, Hetero Convergence Team, Tsukuba 3058564, Japan

来源：

APPLIED PHYSICS LETTERS | 2015年 / 106卷 / 22期

基金：

日本学术振兴会;

关键词：

RESONANCE FREQUENCY; SURFACE STRESS; CANTILEVER;

D O I：

10.1063/1.4921082

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper reports ultrasensitive mass detection based on the relative change in the amplitude ratio of the first mode oscillation using self-excited coupled microcantilevers. The method proposed and demonstrated using the macrocantilevers in the previous study can measure eigenstate shifts caused by objects with high accuracy without being affected by the viscous damping effect of measurement environments. In this study, moving towards the use of this method for small mass measurements, we established the self-excited coupled microcantilevers and we have achieved in measurements of very small mass (about 1 ng) with 1% order of error. (C) 2015 AIP Publishing LLC.

引用

页数：4

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