共 50 条
- [43] APPLICATIONS OF MONTE-CARLO SIMULATION IN THE ANALYSIS OF A SPUTTER-DEPOSITION PROCESS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (02): : 189 - 195
- [45] COLLIMATED MAGNETRON SPUTTER-DEPOSITION WITH GRAZING ANGLE ION-BOMBARDMENT JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (01): : 156 - 158
- [46] Reactive magnetron sputter-deposition of NbN and (Nb,Ti)N films related to sputtering source characterization and optimization JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2001, 19 (04): : 1840 - 1845
- [47] Characterization and Modeling of Resistive-Transition Phenomena and Electronic Structure of Sputter-Deposition SiO2 Films 2014 11TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE ELECTRONICS (WOLTE), 2014, : 69 - 72
- [48] Controlling ion fluxes during reactive sputter-deposition of SnO 2:F Jäger, T. (timo.jaeger@empa.ch), 1600, American Institute of Physics Inc. (116):