Proceedings of the 17th International Conference on "Insulating Films on Semiconductors" June 21-24, 2011 Grenoble, France Preface

被引：0

作者：

Cristoloveanu, Sorin

Reimbold, Gilles

Leroux, Charles

机构：

来源：

MICROELECTRONIC ENGINEERING | 2011年 / 88卷 / 07期

关键词：

D O I：

10.1016/j.mee.2011.05.020

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1043 / 1043

页数：1

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