PROCEEDINGS OF THE INTERNATIONAL-CONFERENCE ON MICROFABRICATION - SEPTEMBER 21-24, 1992 - ERLANGEN, GERMANY - PREFACE

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作者：

RYSSEL, H

STEPHANI, D

机构：

来源：

MICROELECTRONIC ENGINEERING | 1993年 / 21卷 / 1-4期

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D O I：

10.1016/0167-9317(93)90014-V

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：R7 / R7

页数：1

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