Morphology and electrical properties of SrTiO3-films on conductive oxide films

The effect of various electrically conductive oxides on the morphology and the electrical properties of SrTiO3 films (STO) was investigated by means of scanning electron microscopy, impedance analysis and leakage current measurement (DC). LaNiO3 (LNO), La0.5Sr0.5CoO3 (LSCO) and La0.7Sr0.3MnO3 (LSMO) as electrically conductive oxides were deposited on platinized silicon wafers by chemical solution deposition (CSD) via the propionate route. Subsequently a film of STO was deposited by CSD of an acetate based precursor solution. Platinum contacts were sputtered onto the STO film to act as top electrodes. The STO films in these multilayer structures showed significant differences to STO films grown directly on the platinized substrate with respect to morphology as well as to the electrical properties. (C) 2001 Elsevier Science Ltd. All rights reserved.