Fast Industrial Inspection of Optical Thin Film Using Optical Coherence Tomography

被引：29

作者：

Shirazi, Muhammad Faizan ^{[1
]}

Park, Kibeom ^{[1
]}

Wijesinghe, Ruchire Eranga ^{[1
]}

Jeong, Hyosang ^{[2
]}

Han, Sangyeob ^{[2
]}

Kim, Pilun ^{[2
]}

Jeon, Mansik ^{[1
]}

Kim, Jeehyun ^{[1
,2
]}

机构：

[1] Kyungpook Natl Univ, Sch Elect Engn, Coll IT Engn, 80 Daehak Ro, Daegu 41566, South Korea

[2] Oz Tec Co Ltd, Off 901, IT Convergence Ind Bldg,47 Gyeongdae Ro,17 Gil, Daegu 41566, South Korea

来源：

SENSORS | 2016年 / 16卷 / 10期

关键词：

OCT; LCD; optical thin film; industrial inspection; GPU; SUBSURFACE DEFECT DETECTION; NONDESTRUCTIVE INSPECTION; MACHINE-VISION; RESOLUTION; SYSTEM; RANGE; OCT;

D O I：

10.3390/s16101598

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

An application of spectral domain optical coherence tomography (SD-OCT) was demonstrated for a fast industrial inspection of an optical thin film panel. An optical thin film sample similar to a liquid crystal display (LCD) panel was examined. Two identical SD-OCT systems were utilized for parallel scanning of a complete sample in half time. Dual OCT inspection heads were utilized for transverse (fast) scanning, while a stable linear motorized translational stage was used for lateral (slow) scanning. The cross-sectional and volumetric images of an optical thin film sample were acquired to detect the defects in glass and other layers that are difficult to observe using visual inspection methods. The rapid inspection enabled by this setup led to the early detection of product defects on the manufacturing line, resulting in a significant improvement in the quality assurance of industrial products.

引用

页数：13

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