Fast Industrial Inspection of Optical Thin Film Using Optical Coherence Tomography

被引：29

作者：

Shirazi, Muhammad Faizan ^{[1
]}

Park, Kibeom ^{[1
]}

Wijesinghe, Ruchire Eranga ^{[1
]}

Jeong, Hyosang ^{[2
]}

Han, Sangyeob ^{[2
]}

Kim, Pilun ^{[2
]}

Jeon, Mansik ^{[1
]}

Kim, Jeehyun ^{[1
,2
]}

机构：

[1] Kyungpook Natl Univ, Sch Elect Engn, Coll IT Engn, 80 Daehak Ro, Daegu 41566, South Korea

[2] Oz Tec Co Ltd, Off 901, IT Convergence Ind Bldg,47 Gyeongdae Ro,17 Gil, Daegu 41566, South Korea

来源：

SENSORS | 2016年 / 16卷 / 10期

关键词：

OCT; LCD; optical thin film; industrial inspection; GPU; SUBSURFACE DEFECT DETECTION; NONDESTRUCTIVE INSPECTION; MACHINE-VISION; RESOLUTION; SYSTEM; RANGE; OCT;

D O I：

10.3390/s16101598

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

An application of spectral domain optical coherence tomography (SD-OCT) was demonstrated for a fast industrial inspection of an optical thin film panel. An optical thin film sample similar to a liquid crystal display (LCD) panel was examined. Two identical SD-OCT systems were utilized for parallel scanning of a complete sample in half time. Dual OCT inspection heads were utilized for transverse (fast) scanning, while a stable linear motorized translational stage was used for lateral (slow) scanning. The cross-sectional and volumetric images of an optical thin film sample were acquired to detect the defects in glass and other layers that are difficult to observe using visual inspection methods. The rapid inspection enabled by this setup led to the early detection of product defects on the manufacturing line, resulting in a significant improvement in the quality assurance of industrial products.

引用

页数：13

共 50 条

[1] Optical thin film inspection using parallel spectral domain optical coherence tomography
Shirazi, Muhammad Faizan
Wijesinghe, Ruchire Eranga
Ravichandran, Naresh Kumar
Kim, Pilun
Jeon, Mansik
Kim, Jeehyun
2017 25TH INTERNATIONAL CONFERENCE ON OPTICAL FIBER SENSORS (OFS), 2017, 10323
[2] Application of Optical Coherence Tomography in Micrometric Industrial Inspection
Rosa, Carla Carmelo
Hosseiny, Hamid
Marques, Manuel Jorge
WOMEN IN PHYSICS, 2013, 1517 : 213 - 213
[3] Film thickness measurement and defect inspection using optical coherence tomography
Qin, Yuwei
Zhao, Hong
Zhang, Lu
Wang, Liwei
OPTIK, 2013, 124 (22): : 5293 - 5296
[4] Nondestructive defect inspection for LCDs using optical coherence tomography
Kim, Su-Hwan
Kim, Jee-Hyun
Kang, Shin-Won
DISPLAYS, 2011, 32 (05) : 325 - 329
[5] Tomographic Inspection of Fiber Coils Using Optical Coherence Tomography
Li, Zhihong
Meng, Zhuo
Wang, Longzhi
Liu, Tiegen
Yao, Steve X.
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 27 (05) : 549 - 552
[6] Parallel Optical Coherence Tomography (pOCT) for industrial 3D inspection
Lambelet, Patrick
OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VII, 2011, 8082
[7] Optical Inspection of ITO Conducting Glass with Optical Coherence Tomography
Chang, Feng-Yu
Tsai, Meng-Tsan
2011 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2011,
[8] Optical inspection of solar cells using phase-sensitive optical coherence tomography
Tsai, Meng-Tsan
Chang, Feng-Yu
Yao, Yung-Chi
Mei, Jie
Lee, Ya-Ju
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2015, 136 : 193 - 199
[9] Speckle averaging for optical coherence tomography by vibration of a thin water film
Park, B. Hyle
Pierce, Mark C.
Cense, Barry
De Boer, Johannes F.
Proc SPIE Int Soc Opt Eng, (391-396):
[10] Speckle averaging for optical coherence tomography by vibration of a thin water film
Park, BH
Pierce, MC
Cense, B
de Boer, JF
COHERENCE DOMAIN OPTICAL METHODS AND OPTICAL COHERENCE TOMOGRAPHY IN BIOMEDICINE VIII, 2004, 5316 : 391 - 396

← 1 2 3 4 5 →