Scanning thermal microscopy based on a quartz tuning fork and a micro-thermocouple in active mode (2ω method)

被引:11
|
作者
Bontempi, Alexia [1 ]
Tran Phong Nguyen [1 ]
Salut, Roland [1 ]
Thiery, Laurent [1 ]
Teyssieux, Damien [1 ]
Vairac, Pascal [1 ]
机构
[1] Univ Franche Comte, FEMTO ST Inst, CNRS, UMR 6174,ENSMM,UTBM, 15B Ave Montboucons, F-25030 Besancon, France
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2016年 / 87卷 / 06期
关键词
FIELD OPTICAL MICROSCOPES; SAMPLE DISTANCE CONTROL; PROBE MICROSCOPY; SENSORS; DISSIPATION; AMPLITUDE;
D O I
10.1063/1.4952958
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A novel probe for scanning thermal microscope using a micro-thermocouple probe placed on a Quartz Tuning Fork (QTF) is presented. Instead of using an external deflection with a cantilever beam for contact detection, an original combination of piezoelectric resonator and thermal probe is employed. Due to a non-contact photothermal excitation principle, the high quality factor of the QTF allows the probe-to-surface contact detection. Topographic and thermal scanning images obtained on a specific sample points out the interest of our system as an alternative to cantilevered resistive probe systems which are the most spread. Published by AIP Publishing.
引用
收藏
页数:7
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