All-Silicon Telecom Wavelength Detector Fabricated on Silicon-On-Insulator

被引:0
|
作者
Haret, Laurent-Daniel [1 ]
Checoury, Xavier [1 ]
Han, Zheng [1 ]
Boucaud, Philippe [1 ]
Combrie, Sylvain [2 ]
de Rossi, Alfredo [2 ]
机构
[1] Univ Paris 11, Inst Elect Fondamentale, CNRS, Batiment 220, F-91405 Orsay, France
[2] Thales Res & Technol, Palaiseau, France
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate an ultra-compact all-silicon metal-semiconductor-metal photodetector operating in the telecom band. Resonant absorption is obtained through two-dimensional photonic crystal cavities on silicon-on-insulator with quality factors around 80,000. The waveguide integrated detector exhibits a cw response up to 20 mA/W.
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页数:3
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