Post-fabrication Trimming of Silicon Photonic Circuits by Femtosecond Laser Pulses

被引：0

作者：

Bachman, Daniel ^{[1
]}

Chen, Zhijiang ^{[1
]}

Tsui, Ying Y. ^{[1
]}

Fedosejevs, Robert ^{[1
]}

Van, Vien ^{[1
]}

机构：

[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 1H9, Canada

来源：

2016 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC) | 2016年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Single femtosecond laser pulses are used to permanently change the effective index of silicon waveguides. The mechanism provides a fast, robust technique for post-fabrication tuning of silicon photonic circuits at the wafer level.

引用

页数：3

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