Femtosecond Laser-Induced Formation of Surface Structures on Silicon and Glassy Carbon Surfaces

被引：4
|
作者：
Abramov, D., V [1 ]
Galkin, A. F. [1 ]
Gerke, M. N. [1 ]
Zhirnova, S., V [1 ]
Shamanskaya, E. L. [1 ]
机构：
[1] Vladimir State Univ, Vladimir 600000, Russia
来源：
LASERS IN MANUFACTURING 2011: PROCEEDINGS OF THE SIXTH INTERNATIONAL WLT CONFERENCE ON LASERS IN MANUFACTURING, VOL 12, PT B | 2011年 / 12卷
关键词：
Microstructuring; Femtosecond laser; Silicon; Crystal orientation; Glassy carbon;
D O I：
10.1016/j.phpro.2011.03.101
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The article reports about the results of experimental studying of pulsed laser irradiation of the surface of glassy carbon and silicon samples with different crystal plane orientation. Formation of periodical nanostructures on the irradiated silicon surface was registered. Significant dependence of characteristics of structures from crystal orientation was found. Surface structures on silicon (111) have deeper pores than on silicon (100) at equal conditions of laser action. The similar nanostructures were found on the surface of glassy carbon after interaction with femtosecond laser radiation.
引用
收藏
页码：24 / 28
页数：5
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