Nonlinear system identification of rapid thermal processing

被引：3
|
作者：
Tian, CZ
Fujii, T
机构：
[1] Tokyo Electron LTD, TBS Broadcast Ctr, Minato Ku, Tokyo 1078481, Japan
[2] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan
来源：
CONTROL ENGINEERING PRACTICE | 2005年 / 13卷 / 06期
关键词：
identification; nonlinear models; kalman filters; measurement noise; recursive estimation; adaptive control;
D O I：
10.1016/j.conengprac.2004.08.001
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Identification of rapid thermal processing parameters is examined to find a more accurate model to predict and control the temperature of semiconductor wafers during processing. In this paper, a Wiener model is applied to identify the significant dynamics of an RTP system. A recursive method is developed to simultaneously estimate the model parameters and states with respect to parameter variation in RTP systems under process noise. The identification result shows that the model's prediction error was greatly reduced as compared to a linear model. The proposed method can also be easily applied to model-based adaptive control. (c) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码：681 / 687
页数：7
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