Nonlinear model reduction strategies for rapid thermal processing systems

被引：1

作者：

Banerjee, S ^{[1
]}

Cole, JV ^{[1
]}

Jensen, KF ^{[1
]}

EmamiNaeni, A ^{[1
]}

机构：

[1] MIT,DEPT CHEM ENGN,CAMBRIDGE,MA 02139

来源：

RAPID THERMAL AND INTEGRATED PROCESSING V | 1996年 / 429卷

关键词：

D O I：

10.1557/PROC-429-57

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：57 / 63

页数：7

共 50 条

[1] Nonlinear model reduction strategies for rapid thermal processing systems
Banerjee, S
Cole, JV
Jensen, KF
[J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1998, 11 (02) : 266 - 275
[2] Nonlinear model reduction with application to rapid thermal processing
Aling, H
Kosut, RL
EmamiNaeini, A
Ebert, JL
[J]. PROCEEDINGS OF THE 35TH IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-4, 1996, : 4305 - 4310
[3] Nonlinear model reduction for simulation and control of Rapid Thermal Processing
Aling, H
Banerjee, S
Bangia, AK
Cole, V
Ebert, J
EmamiNaeini, A
Jensen, KF
Kevrekidis, IG
Shvartsman, S
[J]. PROCEEDINGS OF THE 1997 AMERICAN CONTROL CONFERENCE, VOLS 1-6, 1997, : 2233 - 2238
[4] Nonlinear control strategy for thermal budget in spike rapid thermal processing systems based on Wiener model
Jeng, Jyh-Cheng
Chen, Wen-Chung
[J]. ASIA-PACIFIC JOURNAL OF CHEMICAL ENGINEERING, 2012, 7 : S11 - S19
[5] MODEL IDENTIFICATION IN RAPID THERMAL-PROCESSING SYSTEMS
CHO, YM
KAILATH, T
[J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1993, 6 (03) : 233 - 245
[6] Control strategies for thermal budget and temperature uniformity in spike rapid thermal processing systems
Jeng, Jyh-Cheng
Chen, Wen-Chung
[J]. COMPUTERS & CHEMICAL ENGINEERING, 2013, 57 : 141 - 150
[7] Optimal control of rapid thermal processing systems by empirical reduction of modes
Park, HM
Yoon, TY
Kim, OY
[J]. INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, 1999, 38 (10) : 3964 - 3975
[8] Spectrum-based Model Reduction of Rapid Thermal Processing System
Xiao, Tengfei
Li, Han-Xiong
[J]. 2014 CACS INTERNATIONAL AUTOMATIC CONTROL CONFERENCE (CACS 2014), 2014, : 249 - 253
[9] Nonlinear system identification of rapid thermal processing
Tian, CZ
Fujii, T
[J]. CONTROL ENGINEERING PRACTICE, 2005, 13 (06) : 681 - 687
[10] Nonlinear model identification for temperature control in single wafer rapid thermal processing
Cho, Wonhui
Edgar, Thomas F.
Lee, Jietae
[J]. INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, 2008, 47 (14) : 4791 - 4796

← 1 2 3 4 5 →