A highly sensitive humidity sensor based on DC reactive magnetron sputtered zinc oxide thin film

被引：98

作者：

Kannan, Padmanathan Karthick ^{[1
]}

Saraswathi, Ramiah ^{[1
]}

Rayappan, John Bosco Balaguru ^{[2
,3
]}

机构：

[1] Madurai Kamaraj Univ, Dept Mat Sci, Sch Chem, Madurai 625021, Tamil Nadu, India

[2] SASTRA Univ, Sch Elect & Elect Engn, Thanjavur 613401, Tamil Nadu, India

[3] SASTRA Univ, Ctr Nanotechnol & Adv Biomat, Thanjavur 613401, Tamil Nadu, India

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2010年 / 164卷 / 1-2期

关键词：

Sputtered zinc oxide; Humidity sensor; Chemiresistor; Adsorption of water vapor; OPTICAL-PROPERTIES; IMPEDANCE SPECTROSCOPY; ZNO NANORODS; SUBSTRATE-TEMPERATURE; THERMAL EVAPORATION; SENSING PROPERTIES; NANOSTRUCTURES; NANOWIRE; SILICON;

D O I：

10.1016/j.sna.2010.09.006

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nanostructured ZnO thin film was prepared by DC reactive magnetron sputtering and characterized by X-ray diffraction SEM AFM FT-IR spectroscopy UV-vis spectroscopy and photoluminescence measurements Under the conditions employed the sputtered ZnO film was found to be polycrystalline with grain size varying between 70 and 100 nm The absorption and photoluminescence spectral data indicated the presence of defects in the form of zinc interstaials and oxygen vacancies which could promote adsorption of gaseous species Impedance technique was used to confirm adsorption of water vapor onto the sensor film The chemiresistor sensor showed nearly a four order variation in resistance in the relative humidity range between 63 and 84% with a response and recovery time of 3 and 12s respectively The device exhibited high stability offering scope for developing a practical humidity sensor (c) 2010 Elsevier B V All rights reserved

引用

页码：8 / 14

页数：7

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