The realization of weak-signal detection circuits for MEMS resonant accelerometers

被引：0

作者：

Liu, Jun ^{[1
]}

Wang, Ling ^{[1
]}

Shi, Yunbo ^{[1
]}

Ma, Fai ^{[1
]}

机构：

[1] N Univ China, Natl Key Lab Elect Measurement & Technol, Dept Elect Sci & Technol, Taiyuan 030051, Shanxi, Peoples R China

来源：

ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS | 2007年

关键词：

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A basic requirement for the design of higher precision resonance accelerometers is a reduction in the errors in the output signals introduced by environmental noise during signal transmission and processing. In order to improve the precision of detection, sensitive and wide dynamic-range resonant accelerometers were fabricated in Peking University that utilized static driving and capacitance detection. The capacitance pick-up circuit and the frequency-separation circuit were specifically designed to detect weak signals. Subsequently, precision protractors were used to test the capability of the accelerometers designed. As demonstrated by experiments, the sensitivity of these accelerometers was about 25.7 Hz/g while the test errors were about 0.27 Hz/g.

引用

页码：4938 / 4941

页数：4

共 50 条

[31] Weak Resonant Signal Detection of Resonant Microcantilever Sensors Based on Duffing System
Dai R.
Yu H.
Wang Q.
[J]. Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2020, 56 (13): : 50 - 59
[32] A weak-signal GPS architecture for lunar navigation and communication systems
Stadter, P. A.
Duven, D. J.
Kantsiper, B. L.
Sharer, P. J.
Finnegan, E. J.
Weaver, G. L.
[J]. 2008 IEEE AEROSPACE CONFERENCE, VOLS 1-9, 2008, : 1166 - 1176
[33] NARROW-BAND, WEAK-SIGNAL AMPLIFIER FOR A FREQUENCY METER
KUZNETSOV, AA
BARYSHEV, VI
[J]. MEASUREMENT TECHNIQUES, 1979, 22 (08) : 977 - 978
[34] A Rapid Weak Signal Detection Approach in Resonant Pressure Sensors
Zhang, Yanqin
Xing, Weiwei
Zhang, Chenxiao
[J]. PROCEEDINGS OF THE 4TH INTERNATIONAL CONFERENCE ON MECHATRONICS, MATERIALS, CHEMISTRY AND COMPUTER ENGINEERING 2015 (ICMMCCE 2015), 2015, 39 : 2651 - 2654
[35] Resolution and Start-up Dynamics of MEMS Resonant Accelerometers
Tocchio, A.
Caspani, A.
Langfelder, G.
Longoni, A.
Lasalandra, E.
[J]. 2011 IEEE SENSORS, 2011, : 161 - 164
[36] On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers
Qiao, Zhiliang
Boom, Boris A.
Annema, Anne-Johan
Wiegerink, Remco J.
Nauta, Bram
[J]. MICROMACHINES, 2018, 9 (10):
[37] An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers
Cai, Pengcheng
Xiong, Xingyin
Wang, Kunfeng
Wang, Jiawei
Zou, Xudong
[J]. MICROMACHINES, 2021, 12 (09)
[38] SENSITIVITY ENHANCEMENT OF MEMS RESONANT ACCELEROMETERS BY USING ELECTROSTATIC SPRING
Xiong, Xingyin
Zheng, Wang
Wang, Kunfeng
Li, Zhitian
Yang, Wuhao
Zou, Xudong
[J]. 2020 7TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2020), 2020,
[39] Generalized Parameter-Adjusted Stochastic Resonance of Duffing Oscillator and Its Application to Weak-Signal Detection
Lai, Zhi-Hui
Leng, Yong-Gang
[J]. SENSORS, 2015, 15 (09) : 21327 - 21349
[40] Weak-signal transceiver uses asynchronous spread spectrum communication method
Anon
[J]. JEE. Journal of electronic engineering, 1988, 25 (259): : 102 - 104

← 1 2 3 4 5 →