The realization of weak-signal detection circuits for MEMS resonant accelerometers

A basic requirement for the design of higher precision resonance accelerometers is a reduction in the errors in the output signals introduced by environmental noise during signal transmission and processing. In order to improve the precision of detection, sensitive and wide dynamic-range resonant accelerometers were fabricated in Peking University that utilized static driving and capacitance detection. The capacitance pick-up circuit and the frequency-separation circuit were specifically designed to detect weak signals. Subsequently, precision protractors were used to test the capability of the accelerometers designed. As demonstrated by experiments, the sensitivity of these accelerometers was about 25.7 Hz/g while the test errors were about 0.27 Hz/g.