Fabrication and characterization of magnetically hard CoPt ordered sub-micron structures

被引:0
|
作者
Castaldi, L [1 ]
Raptis, I
Manios, E
Niarchos, D
机构
[1] NCSR Demokritos, Inst Mat Sci, Athens 15310, Greece
[2] NCSR Demokritos, Inst Microelect, Athens 15310, Greece
来源
关键词
CoPt; hard magnetic; sub-micron structure;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The present study describes the properties of magnetically hard Co50Pt50 ordered sub-micron structures. The e-beam nanolithography process and the deposition by sputtering resulted in the formation of Co50Pt50 ordered arrays 250-1000 nm sized. The thermal annealing of the samples at 650 degrees C for 30 minutes led to the crystallization of the specimen in the L1(0) phase and to their consequent magnetic hardening both in the parallel (H-c = 6.2 kOe) and in the perpendicular (H-c = 4.1 kOe) direction with respect to the film plane.
引用
收藏
页码:1605 / 1609
页数:5
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