Femtosecond-Laser-Induced Blister Formation on Polymer Thin Films

被引:0
|
作者
Godfrey, Alan T. K. [1 ]
Kallepalli, L. N. Deepak [1 ]
Ratte, Jesse J. [1 ]
Corkum, P. B. [1 ]
机构
[1] Univ Ottawa, Dept Phys, Ottawa, ON, Canada
来源
关键词
Femtosecond lasers; Polymers; Laser fabrication; Microfabrication; Laser-Induced Forward Transfer;
D O I
10.1109/pn.2019.8819531
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We present the formation of protruding 'blister' microstructures in polyimide and PMMA thin films using tightly-focused femtosecond pulses. We also show that implanting a reflective metal layer in the polymer film lowers the required pulse energies for forming blisters and prevents film rupture.
引用
收藏
页数:1
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