Microstructure on titanium oxide and silicon nitride formed by KrF excimer laser ablation

被引：0
|
作者：
Shimoda, T [1 ]
Takahashi, K [1 ]
Obara, M [1 ]
机构：
[1] Kei Univ, Dept Elect & Elect Engn, Kohoku Ku, Kawasaki, Kanagawa 2138522, Japan
来源：
CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST | 2001年
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We have created conical microstructures on sintered flat TiO2 and Si3N4 by near-threshold KrF laser ablation. The surface morphology and the chemical composition were analyzed with SEM and XPS, respectively.
引用
收藏
页码：32 / 33
页数：2
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