Damage evolution and track formation in crystalline InP and GaAs during swift Kr and Xe ion irradiation

被引：17
|
作者：
Komarov, F [1 ]
Gaiduk, P [1 ]
Kamarou, A [1 ]
机构：
[1] Belarusian State Univ, Inst Appl Phys Problems, Minsk 220064, BELARUS
来源：
VACUUM | 2001年 / 63卷 / 04期
关键词：
A(m)B(v) semiconductors; heavy ions; high-energy implantation; radiation damage; defects; thermal spikes; tracks;
D O I：
10.1016/S0042-207X(01)00254-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
GaAs and InP wafers were irradiated by swift Kr+ and Xe+ with various ion fluences. The implantation was carried out at liquid nitrogen temperature (LNT), room temperature (RT) and higher temperature. Then the samples were investigated by means of the cross-section transmission electron microscopy (XTEM) as well as Rutherford backscattering (RBS) and selective chemical etching/microscopy (SCEM) techniques. GaAs and InP appeared to have a different character of defect accumulation with the ion dose. XTEM studies allowed identification of amorphous track formation in InP. Microparticles of wurtzite InP phase were found in some tracks. A new approach to describe the above mentioned effect was discussed. It is suggested that both fast heating and quenching of local excited regions along ion paths result in imperfect local recrystallization and, therefore, are responsible for track formation. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：657 / 663
页数：7
相关论文
共 42 条
  • [31] Damage evolution in TiC crystals during hydrogen and helium dual-ion beam irradiation
    Hojou, K
    Otsu, H
    Furuno, S
    Kushita, KN
    Sasajima, N
    Izui, K
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 148 (1-4): : 720 - 725
  • [32] Damage evolution in TiC crystals during hydrogen and helium dual-ion beam irradiation
    Hojou, K.
    Otsu, H.
    Furuno, S.
    Kushita, K.N.
    Sasajima, N.
    Izui, K.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1999, 148 (1-4): : 720 - 725
  • [33] Formation of amorphous xenon nanoclusters and microstructure evolution in pulsed laser deposited Ti62.5Si37.5 thin films during Xe ion irradiation
    Sandip Bysakh
    Kazutaka Mitsuishi
    Minghui Song
    Kazuo Furuya
    Kamanio Chattopadhyay
    Journal of Materials Research, 2011, 26 : 62 - 69
  • [34] Formation of amorphous xenon nanoclusters and microstructure evolution in pulsed laser deposited Ti62.5Si37.5 thin films during Xe ion irradiation
    Bysakh, Sandip
    Mitsuishi, Kazutaka
    Song, Minghui
    Furuya, Kazuo
    Chattopadhyay, Kamanio
    JOURNAL OF MATERIALS RESEARCH, 2011, 26 (01) : 62 - 69
  • [35] The contribution of high-LET track to DNA damage formation and cell death for Monoenergy and SOBP carbon ion irradiation
    Chailapakul, Piyawan
    Maloney, Olivia
    Hirakawa, Hirokazu
    Fujimori, Akira
    Kitamura, Hisashi
    Kato, Takamitsu A.
    BIOCHEMICAL AND BIOPHYSICAL RESEARCH COMMUNICATIONS, 2024, 696
  • [36] Micro-Raman investigations on zirconium oxide film during swift heavy ion irradiation to study crystalline-to-crystalline phase transformation kinetics by cascade overlap model
    Singh, Fouran
    Rawat, Mukesh
    Gautam, Subodh K.
    Ojha, Sunil
    JOURNAL OF APPLIED PHYSICS, 2019, 126 (02)
  • [37] Simulation of topography evolution and damage formation during TEM sample preparation using focused ion beams
    Boxleitner, W
    Hobler, G
    Klüppel, V
    Cerva, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2001, 175 : 102 - 107
  • [38] EVOLUTION OF STRUCTURAL DAMAGE IN HIGH-PURITY ALUMINUM-ALLOYS DURING ION IRRADIATION AND THE FOLLOWING HEAT-TREATMENTS
    KAMIGAKI, N
    FURUNO, S
    HOJOU, K
    IZUI, K
    KINO, T
    JOURNAL OF NUCLEAR MATERIALS, 1991, 179 : 970 - 973
  • [39] INSITU OBSERVATION OF DAMAGE EVOLUTION IN SIC CRYSTALS DURING HE+ AND H-2+ DUAL-ION BEAM IRRADIATION
    HOJOU, K
    FURUNO, S
    KUSHITA, KN
    OTSU, H
    IZUI, K
    JOURNAL OF NUCLEAR MATERIALS, 1992, 191 : 583 - 587
  • [40] INSITU OBSERVATION OF DAMAGE EVOLUTION IN SIC CRYSTALS DURING HE+ AND H2+ DUAL-ION BEAM IRRADIATION
    HOJOU, K
    FURUNO, S
    KUSHITA, K
    OTSU, H
    IZUI, K
    JOURNAL OF ELECTRON MICROSCOPY, 1991, 40 (04): : 246 - 246
12345