High speed interferometric ellipsometer

被引：9

作者：

Tsai, Chien-Chung ^{[1
,2
,3
]}

Wei, Hsiang-Chun ^{[1
,2
,3
]}

Huang, Sheng-Lung ^{[2
,3
]}

Lin, Chu-En ^{[4
]}

Yu, Chih-Jen ^{[4
]}

Chou, Chien ^{[1
,4
,5
]}

机构：

[1] Natl Yang Ming Univ, Inst Biophoton, Taipei 112, Taiwan

[2] Natl Taiwan Univ, Grad Inst Photon & Optoelect, Taipei 106, Taiwan

[3] Natl Taiwan Univ, Dept Elect Engn, Taipei 106, Taiwan

[4] Natl Cent Univ, Dept Opt & Photon, Jhongli 320, Taiwan

[5] Natl Yang Ming Univ, Dept Biomed Imaging & Radiol Sci, Taipei 112, Taiwan

来源：

OPTICS EXPRESS | 2008年 / 16卷 / 11期

关键词：

D O I：

10.1364/OE.16.007778

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel high speed interferometric ellipsometer (HSIE) is proposed and demonstrated. It is based on a novel differential-phase decoder which is able to convert the phase modulation into amplitude modulation in a polarized heterodyne interferometer. Not only high detection sensitivity but also fast response ability on ellipsometric parameters (EP) measurements based on amplitude-sensitive method is constructed whereas different amplitudes with respect to P and S polarized heterodyne signals in this phase to amplitude modulation conversion is discussed. The ability of HSIE was verified by testing a quarter wave plate while a real time differential-phase detection of a liquid crystal device versus applied voltage by using HSIE was demonstrated too. These results confirm that HSIE is able to characterize the optical property of specimen in terms of EP at high speed and high detection sensitivity experimentally. (C) 2008 Optical Society of America.

引用

页码：7778 / 7788

页数：11

共 50 条

[21] High precision speed measurement by using interferometric techniques
Rodriguez Avila, M. A.
Ochoa Valiente, R.
Garcia Trujillo, L. A.
VII INTERNATIONAL CONGRESS OF ENGINEERING PHYSICS, 2015, 582
[22] High speed interferometric aluminum disk blank tester
Olszak, A
Stumpe, K
Copenhaver, R
Angeli, G
SURFACE CHARACTERIZATION FOR COMPUTER DISKS, WAFERS, AND FLAT PANEL DISPLAYS, 1999, 3619 : 92 - 100
[23] Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster
Hemmes, K.
Hamstra, M.A.
Koops, K.R.
Wind, M.M.
Schram, T.
de Laet, J.
Bender, H.
Thin Solid Films, 1998, 313-314 (1-2): : 40 - 46
[24] Interferometric Imaging Ellipsometer for Characterizing the Physical Parameters of a Grown Oxide Layer
A. W. Abdallah
N. Farid
MAPAN, 2023, 38 : 161 - 168
[25] Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster
Hemmes, K
Hamstra, MA
Koops, KR
Wind, MM
Schram, T
de Laet, J
Bender, H
THIN SOLID FILMS, 1998, 313 : 40 - 46
[26] Interferometric Imaging Ellipsometer for Characterizing the Physical Parameters of a Grown Oxide Layer
Abdallah, A. W.
Farid, N.
MAPAN-JOURNAL OF METROLOGY SOCIETY OF INDIA, 2023, 38 (01): : 161 - 168
[27] High-speed interferometric spectrally encoded flow cytometry
Golan, Lior
Yeheskely-Hayon, Daniella
Minai, Limor
Yelin, Dvir
OPTICS LETTERS, 2012, 37 (24) : 5154 - 5156
[28] A HIGH PRECISION PHOTOELECTRIC ELLIPSOMETER
JERRARD, HG
SURFACE SCIENCE, 1969, 16 : 137 - &
[29] HIGH PRECISION SCANNING ELLIPSOMETER
ASPNES, DE
STUDNA, AA
APPLIED OPTICS, 1975, 14 (01): : 220 - 228
[30] HIGH-SPEED PHOTOGRAPHY OF HYPERSONIC PHENOMENA BY SCHLIEREN INTERFEROMETRIC METHOD
OERTEL, H
JOURNAL OF THE SMPTE-SOCIETY OF MOTION PICTURE AND TELEVISION ENGINEERS, 1960, 69 (09): : 676 - 676

← 1 2 3 4 5 →