X-ray diffraction investigation of high-temperature SAW-sensor based on LGS crystal

被引：4

作者：

Sakharov, S. ^{[1
]}

Roshchupkin, D. ^{[2
]}

Emelin, E. ^{[2
]}

Irzhak, D. ^{[2
]}

Buzanov, O. ^{[1
]}

Zabelin, A. ^{[1
]}

机构：

[1] FOMOS Mat Co, Buzheninova St 16, Moscow 107023, Russia

[2] Russian Acad Sci, Inst Russian Acad Sci, Inst Microelect Technol & High Pur Mat, Chernogolovka 142432, Russia

来源：

EUROSENSORS XXV | 2011年 / 25卷

关键词：

High-temperature SAW-sensor; langasite; high-resolution X-ray diffraction technique; SURFACE-ACOUSTIC-WAVE;

D O I：

10.1016/j.proeng.2011.12.251

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In present paper we report the fabrication process of a high-temperature SAW-sensor based on a langasite crystal. Interdigital transducers of the SAW-resonator structures were fabricated from Ir which was evaporated using magnetron sputtering technique. The SAW-sensors were designed with different coefficient of metallization of an IDT, which strongly influences on the value of the SAW velocity and resonance excitation frequency, respectively. The process of the SAW excitation was investigated using high-resolution X-ray diffraction technique (C) 2011 Published by Elsevier Ltd.

引用

页数：4

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