Porous alumina thin films on conductive substrates for templated 1-dimensional nanostructuring

被引：9
|
作者：
Holubowitch, N. [1 ]
Nagle, L. C. [1 ]
Rohan, J. F. [1 ]
机构：
[1] Natl Univ Ireland Univ Coll Cork, Tyndall Natl Inst, Cork, Ireland
来源：
SOLID STATE IONICS | 2012年 / 216卷
关键词：
AAO template; Barrier layer; Ti adhesion layer; Si integration; Pt nanowire array; DMFC; METHANOL FUEL-CELL; NANOWIRE ARRAYS; SI SUBSTRATE; SILICON; ELECTRODEPOSITION; PATTERN; GLASS;
D O I：
10.1016/j.ssi.2012.03.016
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The growth of thin porous anodic aluminum oxide (AAO) films on silicon by anodizing Al on Ti/Au/Si and Ti/Pt/Si substrates in oxalic acid was demonstrated. Removal of the Al2O3 barrier layer was effected by selective chemical etching in H3PO4 and a reversed bias method in the anodizing solution. Ion transport and the influence of the Ti adhesion layer at the oxide-metal interface during the critical stages of anodization and pore opening were investigated. The AAO films may be exploited as templates in the creation of silicon-integrated nanostructured wire arrays. Electrodeposition of Pt into the AAO template yielded a nanowire array with superior methanol oxidation activity that can be integrated in a micro direct methanol fuel cell. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：110 / 113
页数：4
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